Optical method for the characterization of the electrical proper

Details Optical method for the characterization of the electrical proper Optical method for the characterization of the electrical proper

1997-09-05

1999-12-28

Hantis, K. P.

Optics: measuring and testing

For light transmission or absorption

356417, 356432T, 356319, 356445, 356381, 356345, 73800, 250226, G01N 2100

Patent

active

060089067

ABSTRACT:
A method for characterizing a sample includes the steps of (a) providing a semiconductor material; (b) applying at least one of an electric field, a pulsed or cw light source, a change in temperature and/or a change in pump pulse intensity to the semiconductor material; (c) absorbing pump light pulses in a portion of the semiconductor material and measuring changes in optical constants as indicated by probe light pulses applied at some time t following the absorption of the pump light pulses; and (e) associating a measured change in the optical constants with at least one of a surface charge, dopant concentration, trap density, or minority carrier lifetime.

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