Optics: measuring and testing – For light transmission or absorption
Patent
1997-02-28
1998-12-01
McGraw, Vincent P.
Optics: measuring and testing
For light transmission or absorption
356445, G01N 2100, G01N 2155
Patent
active
058446842
ABSTRACT:
Disclosed is a method for characterizing a sample, comprising the steps of: (a) acquiring data from the sample using at least one probe beam wavelength to measure, for times less than a few nanoseconds, a change in the reflectivity of the sample induced by a pump beam; (b) analyzing the data to determine at least one material property by comparing a background signal component of the data with data obtained for a similar delay time range from one or more samples prepared under conditions known to give rise to certain physical and chemical material properties; and (c) analyzing a component of the measured time dependent reflectivity caused by ultrasonic waves generated by the pump beam using the at least one determined material property. The first step of analyzing may include a step of interpolating between reference samples to obtain an intermediate set of material properties. The material properties may include sound velocity, density, and optical constants. In one embodiment, only a correlation is made with the background signal, and at least one of the structural phase, grain orientation, and stoichiometry is determined.
REFERENCES:
patent: 3950987 (1976-04-01), Slezinger et al.
patent: 4484820 (1984-11-01), Rosencwaig
patent: 4522510 (1985-06-01), Rosencwaig et al.
patent: 4579463 (1986-04-01), Rosencwaig et al.
patent: 4632561 (1986-12-01), Rosencwaig et al.
patent: 4636088 (1987-01-01), Rosencwaig et al.
patent: 4679946 (1987-07-01), Rosencwaig et al.
patent: 4710030 (1987-12-01), Tauc et al.
patent: 4750822 (1988-06-01), Rosencwaig et al.
patent: 4795260 (1989-01-01), Schuur et al.
patent: 4854710 (1989-08-01), Opsal et al.
patent: 4952063 (1990-08-01), Opsal et al.
patent: 4999014 (1991-03-01), Gold et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5042952 (1991-08-01), Opsal et al.
patent: 5074669 (1991-12-01), Opsal
patent: 5083869 (1992-01-01), Nakata et al.
patent: 5379109 (1995-01-01), Gaskill et al.
patent: 5546811 (1996-08-01), Rogers et al.
patent: 5574562 (1996-11-01), Fishman et al.
patent: 5585921 (1996-12-01), Pepper et al.
W. Lee Smith et al. "Ion implant monitoring with thermal wave technology". Appl. Phys.Lett.. vol. 47 No. 6, Sep. 15, 1985. pp. 584-586.
J. Opsal et al. "Thermal and plasma wave depth profiling in silicon". Appl. Phys. Lett. vol. 47 No. 5, Sep. 1, 1985. pp. 498-500.
A. Rosencwaig et al. "Thin-film thickness measurments with thermal waves". Appl. Phys. Lett., vol. 43 No. 2, Jul. 15, 1983. pp. 166-168.
A Rosencwaig et al. "Detection of thermal waves through optical reflectance". Appl. Phys. Lett., vol. 46 No. 11, Jun. 1, 1985. pp. 1013-1015.
A. Elci et al. "Physics of Ultrafast Phenomena in Solid State Plasmas". Solid-State Electronics, vol. 21, 1978, pp. 151-158.
D.H. Auston et al. "Picosecond Spectroscopy of Semiconductors". Solid-State Electronics, vol. 21, 1978, pp. 147-150.
D. H. Auston et al. "Picosecond Ellipsometry of Transient Electron-Hole Plasmas in Geranium". Physical Review Letters, vol. 32 No. 20. May 20, 1974 pp. 1120-1123.
R.J. Stoner et al. "Kapitza conductance and heat flow between solids at temperatures from 50 to 300K". Physical Review B, vol. 48, No. 22, Dec. 1, 1993 pp. 16 373-16 387.
R.J. Stoner et al. "Measurments of the Kapitza Conductance between Diamond and Several Metals". Physical Review Letters, vol. 68 No. 10, Mar. 9, 1992 pp. 1563-1566.
S. Sumie et al. "A New Method of Photothermal Displacement Measurement by Laser Interferometric Probe". Jpn. J. Appl. Phys. vol. 31 Pt. 1, No. 11, 1992 pp. 3575-3583.
S. Sumie et al. J.Appl. Phys. 76(10), Nov. 15, 1994 pp. 5681-5689.
F.E. Doany et al. "Carrier lifetime versus ion-implantation dose in silicon on sapphire". Appl. Phys. Lett. 50(8), Feb. 23, 1987 pp. 460-462.
D.A. Young et al. "Heat Flow in Glasses on a Picosecond Timescale". Dept. of Engineering, Brown University, Providence, RI. 1986. pp. 49-51.
H.T. Grahn et al., "Time-resolved study of vibrations of a Ge:H/aSi:H multilayers", Phys. Review B, vol. 38, No. 9, Sep. 15, 1988.
H.T. Grahn et al., "Sound velocity and index of refraction of AIAs measured by picosecond ultrasonics", Appl. Phys. Lett. 53, Nov. 21, 1988.
H.T. Grahn et al., "Elastic properties of silicon oxynitride films determined by picosecond acoustics", App. Phys. Lett. 53, Dec. 5, 1988.
H.T. Grahn et al., "Picosecond Ulstrasonics", IEEE, vol. 25, #12, Dec. 1989.
H.N. Lin, et al., "Nondestructive Testing of Microstructures by Picosecond Ultrasonics" Journal of Non-Destructive Evaluation, vol. 9 No. 4, 1990.
H.N. Lin et al., "Phonon Attenuation and Velocity Measurements in Transparent Materials by Picosecond Acoustic Interferometry", Journal of Applied Physics, vol. 69, Apr. 1, 1990.
T.C. Zhu et al., Attenuation of longitudinal-acoustic phonons in amorphous SiO.sub.2 at frequencies up to 440 GHz, Physical Review B, vol. 44, #9, Sep. 1, 1991.
H.N. Lin et al., Ultrasonic Experiments At Ultra-High Frequency with Picosecond Time-Resolution, IEEE Ultrasonics Symp. 90.
H.N. Lin et al., "Detection of Titatium Silicide Formation and Phase Transportation by Picosecond Ultrasonics," MRS.
G. Tas et al., "Detection Of thin Interfacial Layers By Picosecond Ultrasonics", Mat. Res. Soc. Symp. Proc. vol. 259, 1992.
G. Tas et al., "Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CF.sub.x at the AI/Si interface", Appl. Phys. Lett. 61, Oct. 12, 1992.
H. N. Lin et al., "study of vibrational modes of gold nanostructures by picosecond ultrasonics", J. Appl. Phys. 73, Jan. 1, 1993.
H.J. Maris et al., Picosecond Optics Studies of Vibrational and Mechanical Properties of Nanostructures, AMD-vol. 140, Acousto-Optics and Acoustic Microscopy, ASME 1992.
C.J. Morath et al., "Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity", J. Appl. Phys. 76, Sep. 1, 1994.
H.N. Lin et al., "Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics", IBM T. J. Watson Research Center (no date given).
H.T. Grahn et al., "Picosecond Photoinduced Electronic and Acoustic Effects In a Si:H Based Multilayer Structures", Journal of Non-Crystalline Solids 97&98, 1987.
G. Tas et al., "Picosecond Ultrasonic Investigation of Thin Interfacial Layers Between Films and a Substrate", IBM T. J. Watson Research Center no date given.
H.J. Maris et al., "Studies of High-Frequency Acoustic Phonons Using Picosecond Optical Techniques", Dept. of Physics, Brown University no date given.
C. Thomsen et al., "Processing Acoustics As A Non-Destructive Tool For the Characterization Of Very Thin Films", Thin Solid Films 154 (1987).
P.A. Elzinga et al., "Pump/probe method for fast analysis of visible spectral signatures utlizing asynchronous optical sampling", Applied Optics, vol. 26, No. 19, Oct. 1, 1987.
R. J. Kneisler et al., "Asynchronous optical sampling: a new combustion diagnostic for potential use in turbulent, high-pressure flames", 1989 Optics Letters, vol. 14, No. 5.
C. Thomsen et al., "Surface generation and detection of phonons by a picosecond light pulses", Physical Review B, vol. 34, No. 6, Sep. 16, 1986.
G.J. Flechtner et al., "Measurements of atomic sodium in flames by asynchronous optical sampling: theory and experiment", Applied Optics, vol. 31, No. 15, May 20, 1992.
O.B. Wright, et al."Characterization Of Transparent And Opaque Thin Films Using Laser Picosecond Ultrasonics", Nondestr. Test Eval. vol. 7, pp. 149-163.
O.B. Wright, "Thickness and sound velocity measurement in thin transparent films with laser picosecond acoustics", Journal of Applied Physics, vol. 71, #4, Feb. 15, 1992.
O.B. Wright, et al., "High Resolution Laser Picosecond Acoustics In Thin Films", Symp. on Physical Acodstics, Belgium, 1990.
O.B. Wright et al., "Laser Picosecond Acoustics in Various Types of Thin Film", Japanese Journal of Applied Physics, vol. 31 (1992).
C.A. Paddock et al., "Transient thermoflectance from thin metal films", J. Appl. Phys. 60, Jul. 1, 1986.
D.M. Pennington et al., "Direct Measurement of the Thermal Expansion of a Surface Using Transient Gratings", Optical Soci
Maris Humphrey J.
Stoner Robert J.
Brown University Research Foundation
McGraw Vincent P.
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