Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2007-02-20
2007-02-20
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
C257SE21530
Reexamination Certificate
active
11060111
ABSTRACT:
A method of processing a sample, comprising the steps of: introducing dopant into a sample thereby producing a doped sample; producing a healed sampled including a doping density profile in response to introducing the dopant into the sample; and measuring the doping density profile of the healed sample by performing reflectometry using light generated within the visible wavelength spectrum.
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Lebentritt Michael
Midwest Research Institute
Stevenson Andre′
White Paul J.
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