Optics: measuring and testing – For light transmission or absorption
Reexamination Certificate
2008-03-04
2008-03-04
Pham, Hoa Q. (Department: 2886)
Optics: measuring and testing
For light transmission or absorption
C356S630000
Reexamination Certificate
active
09969336
ABSTRACT:
Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
REFERENCES:
patent: 3950987 (1976-04-01), Slezinger et al.
patent: 4484820 (1984-11-01), Rosencwaig
patent: 4522510 (1985-06-01), Rosencwaig et al.
patent: 4579463 (1986-04-01), Rosencwaig et al.
patent: 4632561 (1986-12-01), Rosencwaig et al.
patent: 4636088 (1987-01-01), Rosencwaig et al.
patent: 4679946 (1987-07-01), Rosencwaig et al.
patent: 4710030 (1987-12-01), Tauc et al.
patent: 4750822 (1988-06-01), Rosencwaig et al.
patent: 4795260 (1989-01-01), Schuur et al.
patent: 4844617 (1989-07-01), Kelderman
patent: 4854710 (1989-08-01), Opsal et al.
patent: 4952063 (1990-08-01), Opsal et al.
patent: 4999014 (1991-03-01), Gold et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5042952 (1991-08-01), Opsal et al.
patent: 5074669 (1991-12-01), Opsal
patent: 5083869 (1992-01-01), Nakata et al.
patent: 5227912 (1993-07-01), Ho et al.
patent: 5379109 (1995-01-01), Gaskill et al.
patent: 5481475 (1996-01-01), Young
patent: 5523840 (1996-06-01), Nishizawa et al.
patent: 5546811 (1996-08-01), Rogers et al.
patent: 5574562 (1996-11-01), Fishman et al.
patent: 5585921 (1996-12-01), Pepper et al.
patent: 5633711 (1997-05-01), Nelson et al.
patent: 5706094 (1998-01-01), Maris
patent: 5748317 (1998-05-01), Maris et al.
patent: 5748318 (1998-05-01), Maris et al.
patent: 5864393 (1999-01-01), Maris
patent: 5959735 (1999-09-01), Maris et al.
patent: 6008906 (1999-12-01), Maris
patent: 6025918 (2000-02-01), Maris
patent: 6038026 (2000-03-01), Maris
patent: 6057927 (2000-05-01), Levesque et al.
patent: 6081330 (2000-06-01), Nelson et al.
patent: 6191855 (2001-02-01), Maris
patent: 6208418 (2001-03-01), Maris
patent: 6211961 (2001-04-01), Maris
patent: 6317216 (2001-11-01), Maris
patent: 6321601 (2001-11-01), Maris
patent: 6563591 (2003-05-01), Maris
patent: 98/22801 (1998-05-01), None
patent: 98/22815 (1998-05-01), None
W. Lee Smith et al. “Ion imolant monitoring with thermal wave technology”. Appl. Phys.Lett.. vol. 47. No. 6, Sep. 15, 1985. p. 584-586.
J. Opsal et al. “Thermal and plasma wave depth profiling in silicon”. Appl. Phys. Lett. vol. 47 No. 5, Sep. 1, 1985. p. 498-500.
A. Rosencwaig et al. “Thin-film thickness measurements with thermal waves”. Appl. Phys. Lett., vol. 43 No. 2, Jul. 15, 1983. p. 166-168.
A. Rosencwaig et al. “Detection of thermal waves through optical reflectance”. Appl. Phys. Lett., vol. 46 No. 11, Jun. 1, 1985. p. 1013-1015.
A. Elci et al. “Physics of Ultrafast Phenomena in Solid State Plasmas”. Solid-State Electronics, vol. 21, 1978, p. 151-153.
D.H. Auston et al. “Picosecond Spectroscopy of Semiconductors”. Solid-State Electronics, vol. 21, 1978, p. 147-150.
D. A. Young et al., “Heat Flow in Glasses on a Picosecond Timescale”, Dept. of Engineering, Brown University, Providence, RI 1986, p. 49-51.
D. H. Auston et al. “Picosecond Ellipsometry of Transient Electron-Hole Plasmas in Germanium”. Physical Review Letters, vol. 32 No. 20. May 20, 1974 p. 1120-1123.
R.J. Stoner et al. “Kapitza conductance and heat flow between solids at temperatures from 50 to 300K”. Physical Review B, vol. 48, No. 22, Dec. 1, 1993 p. 16 373-16 387.
R.J. Stoner et al. “Measurements of the Kapitza Conductance between Diamond and Several Metals”. Physical Review Letters, vol. 68 No. 10, Mar. 9, 1992 p. 1563-1566.
S. Sumie et al. “A New Method of Photothermal Displacement Measurement by Laser Interferometric Probe”. Jpn. J. Appl. Phys. vol. 31 Pt. 1, No. 11, 1992 p. 3575-3583.
S. Sumie et al. J.Appl. Phys. 76(10), Nov. 15, 1994 p. 5681-5689.
F.E. Doany et al. “Carrier lifetime versus ion-implantation dose in silicon on sapphire”. Appl. Phys. Lett. 50(8), Feb. 23, 1987 p. 460-462.
Search Report for Application No. PCT/US00/23059, dated Aug. 23, 2000.
Brown University
Harrington & Smith PC
Pham Hoa Q.
LandOfFree
Optical method and system for the characterization of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical method and system for the characterization of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical method and system for the characterization of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3954504