Optical method and optical device for distance measurement and t

Details Optical method and optical device for distance measurement and t Optical method and optical device for distance measurement and t

1992-12-28

1994-02-08

Buczinski, Stephen C.

Optics: measuring and testing

Range or remote distance finding

With photodetection

356 45, 356349, G01C 308, G01B 902

Patent

active

052852520

ABSTRACT:
An optical method and optical device for distance measurement, comprising the steps of emitting an incident light beam (13) comprising at least two waves of differing wavelengths (.lambda.1 and .lambda.2); separating this beam into a reference beam (15) and a measurement beam (17) which are reflected on, respectively, a reference reflector (16) and a zone (18) of a part (19), of which it is desired to measure the position in the direction of the measurement beam and recombine into a resultant beam (20), in which said waves exhibit conditions of polarization, the components of which rotate when the optical path of the aforementioned measurement beam varies and which determine, in the direction of the measurement beam, adjacent ranges at the ends of each one of which the angular positions of two corresponding components of these conditions of polarization are identical; determining, in the resultant beam (20), the angular positions (.alpha.1 and .alpha.2) of two corresponding components of said conditions of polarization of said waves; and computing, as a function of said angular positions, the distance separating the aforementioned zone of said part from a reference position, preferably the image of the reference reflector.
Their application to the positioning of parts, especially of a chip inserted in a substrate.

REFERENCES:
patent: 4005936 (1977-02-01), Redman et al.
patent: 4355899 (1982-10-01), Nussmeir
patent: 4695162 (1987-09-01), Itonaga et al.

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