Optical method and device for performing geometrical...

Optics: measuring and testing – Dimension

Reexamination Certificate

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C356S638000

Reexamination Certificate

active

10501327

ABSTRACT:
A light source (1) sends towards an object under test (5) a light beam (2) with such a size as to encompass the object (5). Past the object, the beam (2) is processed by an optical processing system (6), comprising a band-pass spatial filter (8) located in the Fourier Plane of a converging lens (7), the object (5) being located in the front focal plane of that lens. The filtered beam is collected by a detector (10) that generates an electrical signal representative of the intensity of the field distribution associated with that beam. A system (11) for processing the electrical signal comprises a band-pass filter (12) with temporal cut-off frequencies corresponding with the spatial cut-off frequencies of the spatial filter in the optical processing system (6) and obtains the value of the requested quantity form the electrical signal.

REFERENCES:
patent: 4417147 (1983-11-01), Faville
patent: 6922254 (2005-07-01), Blohm et al.
patent: 2003/0160974 (2003-08-01), Demeyere et al.

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