Optical method and apparatus for detecting low frequency defects

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material

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3562392, G01N 2100

Patent

active

060755911

ABSTRACT:
Inspection of an optical object for the existence therein of inhomogeneities, comprises providing a diverging beam of inspection radiation and directing the beam on the optical object so that each point thereof is illuminated at a single angle; projecting the beam through the optical object on a projection screen and obtaining thereby a shadow pattern thereof, the optical inhomogeneities being distinguishable in the shadow pattern owing to the difference in the brightness of the areas corresponding thereto over the background brightness of the pattern; imaging the shadow pattern via the optical object in such a manner that the rays forming the image pass through each point of the optical object at an angle corresponding to the angle at which the point is illuminated; and detecting and analyzing the image of the shadow pattern.

REFERENCES:
patent: 3743431 (1973-07-01), Cushing et al.
patent: 3892494 (1975-07-01), Baker et al.
patent: 4459027 (1984-07-01), Kafri et al.
patent: 4547073 (1985-10-01), Kugimiya
patent: 4810895 (1989-03-01), Kafri et al.
patent: 5016099 (1991-05-01), Bongardt et al.
patent: 5309222 (1994-05-01), Kamei et al.

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