Optical MEMS cavity having a wide scanning range for...

Details Optical MEMS cavity having a wide scanning range for... Optical MEMS cavity having a wide scanning range for...

2007-03-06

2007-03-06

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S519000

Reexamination Certificate

active

10829980

ABSTRACT:
A method for measuring the cavity length of a remote sensing interferometer by locally replicating the state of the remote sensing interferometer by way of a local interferometer. The local interferometer is produced by micro-electromechanical micro machining techniques, thus obtaining a highly accurate and reliable fiber optic sensing at a cost comparable to electronic sensing devices.

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