Optical membrane forming apparatus and optical device produced b

Details Optical membrane forming apparatus and optical device produced b Optical membrane forming apparatus and optical device produced b

1999-01-19

2000-11-07

Lund, Jeffrie R

Coating apparatus

Gas or vapor deposition

With treating means

118723EB, 118730, 20429827, 20429811, C23C 1600

Patent

active

061420972

ABSTRACT:
An optical membrane forming apparatus comprises a vacuum chamber (7), a lens holder (2) placed in the chamber (7) for holding one or more lenses (3) in such a manner that each lens (3) is rotational about its axis, and that the lens holder (2) itself is rotational about its own axis, and a plurality of vaporization sources (10a-10c) placed in the chamber (7). Each of the vaporization sources (10a-10c) produces vaporized particles for forming a layer of the membrane on the surface of the lens (3). The vaporization rate of the plurality of vaporization sources are independently controlled. A diaphragm plate (4) is placed between the vaporization sources (10a-10c) and the lenses (3) in order to control the direction of diffusion of the vaporized particles. Each of the sources (10a-10c) has a sample container which is partitioned into a plurality of rooms to store different samples.

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