Optical member of synthetic quartz glass for excimer lasers and

Details Optical member of synthetic quartz glass for excimer lasers and Optical member of synthetic quartz glass for excimer lasers and

1994-08-05

1996-06-04

Bonner, Melissa

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

501900, C03B 2000, C03C 306

Patent

active

055232663

ABSTRACT:
A synthetic quartz glass optical member for an ultraviolet laser, where the quartz glass has a hydroxyl content of 10-100 ppm, a chlorine content of 200 ppm or less, a hydrogen content of 1.times.10.sup.16 molecules/cm.sup.3 or less, a homogeneity of refractive index of 5.times.10.sup.-6 or less in terms of .DELTA.n, and a birefringence of 5 nm/cm or less.

REFERENCES:
patent: 4162908 (1979-07-01), Rau et al.
patent: 4317668 (1982-03-01), Susa et al.
patent: 5349456 (1994-09-01), Iwanaga et al.
patent: 5364433 (1994-11-01), Nishimura et al.
Derwent Publications Ltd., London, Great Britain, AN 92-196940, Abstract. May 1, 1992.
Derwent Publications Ltd., London, Great Britain, AN 92-076655, Abstract. Dec. 4, 1992.
Derwent Publications Ltd., London, Great Britain, AN 89-275336, Abstract. Aug. 14, 1989.

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