Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate
2005-07-20
2008-08-05
Ahmed, Shamim (Department: 1792)
Etching a substrate: processes
Forming or treating optical article
C216S017000, C216S018000, C216S026000
Reexamination Certificate
active
07407595
ABSTRACT:
A manufacturing method of an optical member for optical path conversion to be connected to an optical waveguide provided in a substrate includes forming plural inclined surfaces on a wafer by etching, forming openings corresponding to the inclined surfaces in a plate-like member, forming a combined body, in which the inclined surfaces and the openings correspond to each other, by bonding the wafer and the plate-like member, and dividing the combined body into small pieces each of which includes the inclined surface and the opening.
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Ahmed Shamim
Fuji 'Xerox Co., Ltd.
Morgan & Lewis & Bockius, LLP
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