Optical member made of high-purity and transparent synthetic sil

Details Optical member made of high-purity and transparent synthetic sil Optical member made of high-purity and transparent synthetic sil

1991-10-23

1995-04-25

Sikes, William L.

Optical: systems and elements

Having significant infrared or ultraviolet property

359900, 252588, 501 53, 501905, G02B 100, C03C 408

Patent

active

054104289

ABSTRACT:
This invention relates to an optical member made of highly transparent, high-purity synthetic silica glass, to a method for manufacturing a blank or an optical member of such glass, and to the optical members themselves. The optical members have an absolute refractive index, n.sub.d, of 1.460 or more and a hydrogen molecule concentration of at least 5.times.10.sup.16 molecules/cm.sup.3 uniformly distributed throughout the glass and are particularly well suited for use in apparatus in which they are exposed to a high-power laser beam such as that produced by an excimer laser.

REFERENCES:
patent: 5028967 (1991-07-01), Yamada et al.
patent: 5086352 (1992-02-01), Yamagata et al.
patent: 5141786 (1992-08-01), Shimizu et al.
F. L. Galeener, "Planar Rings in Vitreous Silica" J. Non-Crys. Sol., 49 (1982) pp. 53-62.
F. L. Galeener, "Planar Rings in Glasses" Solid State Communications, vol. 44, No. 7, pp. 1037-1040 (1982).
"Measuring Method for Striae in Optical Glass" Japanese Optical Glass Industrial Standards JOGIS 11 (1975).
D. M. Dodds, D. B. Fraser, "Optical Determination of OH in Fused Silica", Journal of Applied Physics, vol. 37, p. 3911 (1966).
V. S. Khotimchenko et al., "Determination of the Content of Hydrogen Dissolved in Quartz Glass . . . " Journal of applied Spectroscopy, vol. 46, No. 6, pp. 987-991 (1987).

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