Optical member inspecting apparatus

Details Optical member inspecting apparatus Optical member inspecting apparatus

1996-09-19

1998-11-10

Font, Frank G.

Optics: measuring and testing

Lens or reflective image former testing

For optical transfer function

356239, G01B 900, G01N 2100

Patent

active

058352074

ABSTRACT:
An optical member inspecting apparatus comprises an illuminating unit for illuminating a target lens to be inspected and a photographing unit to detect the light transmitted through the target lens. The illumination unit has a circular diffuser plate on which a semi-circular light intercepting plate is attached. The diffuser plate can rotate about a rotation axis. The target lens is supported by an X-Y stage that moves the target lens in a plane perpendicular to the rotation axis. An image processing unit detects brightness distributions at different rotational positions of the light intercepting plate to calculate a brightness difference which represents a deviation of the optical axis of the target lens from the rotation axis. The image processing unit controls the X-Y stage based on the brightness difference so as to correct the deviation.

REFERENCES:
patent: 5216481 (1993-06-01), Minato
patent: 5243542 (1993-09-01), Noguchi
patent: 5257092 (1993-10-01), Noguchi et al.
patent: 5335059 (1994-08-01), Maruyama et al.
patent: 5351119 (1994-09-01), Nakatsue
patent: 5432606 (1995-07-01), Noguchi et al.
patent: 5448355 (1995-09-01), Noguchi et al.

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