Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Patent
1997-07-15
2000-02-15
Henry, Jon
Optical: systems and elements
Having significant infrared or ultraviolet property
Lens, lens system or component
359664, 356124, G02B 1314, G02B 300
Patent
active
060259558
ABSTRACT:
In a method for evaluating the homogeneity of the refractive index of an optical member, the refractive index distribution of the optical member is measured, the measured refractive index distribution is separated into a rotationally symmetric element and a non-rotationally symmetric element in the optical axis direction before or after correction of the power element, and the rotationally symmetric element is further subjected to 2nd/4th-order element correction. Upon execution of such comprehensive evaluation, a photolithography optical member, which can realize a fine, sharp exposure-transfer pattern (e.g., a line width of 0.3 .mu.m or less) is provided.
REFERENCES:
patent: 4696569 (1987-09-01), Geary et al.
patent: 5086352 (1992-02-01), Yamagata et al.
patent: 5157555 (1992-10-01), Reno
patent: 5234742 (1993-08-01), Hatano et al.
Freitag et al., "Aberration analysis in aerial images formed by lithographic lenses", Applied Optics, May 1, 1992, vol. 31, No. 13, pp. 2284-2290.
U.S. patent application 08/193,474 filed on Feb. 8, 1994 by Hiraiwa et al.
Hiraiwa Hiroyuki
Miyoshi Katsuya
Tanaka Issey
Henry Jon
Nikon Corporation
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