Optical member and method of producing the same, and...

Details Optical member and method of producing the same, and... Optical member and method of producing the same, and...

2005-02-01

2005-02-01

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C369S112020

Reexamination Certificate

active

06850371

ABSTRACT:
An optical member of the invention is an optical member for photolithography used together with light having a wavelength of not more than 250 nm. The optical member is made of a fluoride crystal in which a maximum diameter dmax(cm) of scattering bodies existing internally and a quantity nsof the scattering bodies per 1 cm3satisfy a condition represented by following formula (1):in-line-formulae description="In-line Formulae" end="lead"?0<dmax2×ns<6.5×10−4(cm−1)  (1).in-line-formulae description="In-line Formulae" end="tail"?

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