Optical measuring system for detecting geometric data of...

Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer

Reexamination Certificate

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C356S479000, C356S497000

Reexamination Certificate

active

07456974

ABSTRACT:
An optical measuring system for detecting geometric data of surfaces of at least one object is described, comprising a beam delivery section, a probe system which is connected to the latter and has a plurality of probe outputs for output of a particular measuring beam to an assigned particular surface location and recording the light reflected back by the surface, and having a downstream analyzer unit for determining the geometric data on the basis of light reflected back by the surface locations. A very accurate and mechanically robust determination of surface geometric data, e.g., diameter and roundness of a bore, is achieved by designing the probe system having the probe outputs in such a manner that the relative position of the probe system having the probe outputs positioned in fixed relationship to one another is also determinable in relation to the object(s) at least with regard to several relevant degrees of freedom, in addition to and simultaneously with the determination of the geometric data of the surface(s).

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Zhao et al.,Single-Mode Fiber-Based Reflex Sensor for Internal Surface In-Line Measurement of Small Products, Sensors and Actuators, Elsevier Sequoia S.A., Lausanne, Switzerland, Sep. 30, 2002, vol. 101, No. 1-2, pp. 30-36.

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