Optical measuring device of film thickness

Details Optical measuring device of film thickness Optical measuring device of film thickness

1990-03-26

1991-03-12

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356381, G01N 2186

Patent

active

049995090

ABSTRACT:
The optical measuring device of film thickness consists of a spectral reflectance measuring device and a film thickness deciding device. The film thickness deciding device comprises a reflectance operating device, an evaluation function operating device, a global optimization device, a local optimization device, and settlement judging devices added to the global optimization device and the local optimization device respectively. A data selecting device may be interposed between the spectral reflectance measuring device and the film thickness deciding device. The optical measuring device of film thickness is capable of measuring thickness of individual layers of a multi-layer film simultaneously, speedily and accurately.

REFERENCES:
patent: 3869211 (1975-03-01), Watanable et al.
patent: 4666305 (1987-05-01), Mochida et al.
patent: 4787749 (1988-11-01), Ban et al.
Handbook of Optical Constants of Solids, pp. 564-565-1985.

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