Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-11-04
1996-08-27
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356345, G01B 902
Patent
active
055506330
ABSTRACT:
An optical measuring apparatus includes an environmental chamber which has a blowing opening to which a temperature-controlled gas is supplied from an external device and an exhaust opening for exhausting the air outside the environmental chamber, a light-emitting unit for irradiating a light beam onto an object to be measured arranged in the environmental chamber, a light-receiving unit for receiving the light beam reflected by the object to be measured, and outputting a signal corresponding to a position of the object to be measured. A heat source is provided in the environmental chamber and forms an air layer having a temperature higher than the gas immediately after the gas is supplied from the blowing opening. There is provided a partitioning wall which is arranged between an optical path of the light beam and the heat source to divide a flow of the gas.
REFERENCES:
patent: 4989031 (1991-01-01), Kamiya
English Abstract of Japanese Patent Application Laid-Open No. 2-1505 dated Jan. 5. 1990.
Merlino Amanda
Nikon Corporation
Turner Samuel A.
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