Optical measuring apparatus

Details Optical measuring apparatus Optical measuring apparatus

1984-05-11

1986-09-16

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356360, G01B 902

Patent

active

046119167

ABSTRACT:
In an optical measuring apparatus, measuring light having a frequency f.sub.1 is focused and its beam spot irradiates a surface of an object fixed on a carrier. The carrier is shifted in a direction perpendicular to the optical axis of an objective lens to obtain measuring light reflected by the surface of the object. At the same time, reference light having a frequency f.sub.2 irradiates a mirror mounted on the carrier to be substantially perpendicular to the optical axis of the lens to obtain reflected reference light. The reflected reference light is interfered with the reflected measuring light to detect a beat frequency to optically, precisely measure a shape of the surface of the object.

REFERENCES:
patent: 4139304 (1979-02-01), Redman et al.
patent: 4148587 (1979-04-01), Erdmann et al.
patent: 4353650 (1982-10-01), Sommargren

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