Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1990-01-11
1992-04-07
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
25022728, 25022732, G01B 1124, H01J 516
Patent
active
051022265
ABSTRACT:
An optical object profile measurement system utilizes a light beam to scan an object surface and a position detector which receives a light beam reflected from the object surface to obtain position data of individual scanned points on the object surface. The position data is processed to determine a profile of the object profile along the scanned points. The position detector comprises a number of light receiving elements arranged in at least two linear arrays each extending in the direction of following the light beam moving across the object surface and is divided into subdivisions having one or more of the light receiving elements. The arrays are disposed side-by-side to receive the light beam. In a first one of the arrays, the light receiving elements are designated by first values which have differing subdivisions such that the elements designated by the same first value are coupled to provide a single first output when any one of such elements detects the light beam. In a second one of the arrays, the light receiving elements are designated by the second values which are different within each subdivision but are common to those of the other subdivisions such that the elements designated by the same second values are coupled to provide a single second output when any one of such elements detects the light beam. The first and second values are combined to provide the position data in a coded form for surface profile analysis.
REFERENCES:
patent: 3612888 (1971-10-01), Bocher
patent: 3737629 (1973-06-01), See
patent: 3906220 (1975-09-01), Delingat
patent: 4627734 (1986-12-01), Rioux
patent: 4830485 (1989-05-01), Penney et al.
Okamoto Shinji
Yoshimura Kazunari
Matsushita Electric & Works Ltd.
Pham Hoa
Rosenberger Richard A.
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