Optical measurement of thin films

Details Optical measurement of thin films Optical measurement of thin films

1988-12-19

1990-09-04

Rosenberger, Richard A.

Optics: measuring and testing

Refraction testing

356382, 356432, 372 49, G01N 2141, G01N 2159, G01B 1106

Patent

active

049539744

ABSTRACT:
Properties of thin films are monitored in real time by measuring the interactions of the light from an injection laser diode with the thin film adjacent to one of the facets of the laser diode by an associated photodetector. Thickness, index of refraction and other properties can be measured as a function of the output power, slope efficiency and threshold current of the laser diode.

REFERENCES:
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patent: 4828391 (1989-05-01), Zultzke et al.
O. S. Heavens, "Measurement of Optical Constants of Thin Films," in Physics of Thin Films, vol. 2, G. Hass and R. Thun, Eds., Academic Press, New York and London, 1964, pp. 193-237.
R. E. Denton, R. D. Campbell, and S. G. Tomlin, "The Determination of the Optical Constants of Thin Films from Measurements of Reflectance and Transmittance at Normal Incidence," J. Phys. D 5, 852, (1972).
R. C. McPherdran, L. C. Botten, D. R. McKenzie, and R. P. Netterfield, "Unambiguous Determination of Optical Constants of Absorbing Films by Reflectance and Transmittance Measurements", Appl. Opt. 23, 1197, (1984).
T. C. Paulick, "Inversion of Normal-Incidence, (R, T) Measurements to Obtain N+ik for Thin Films", Appl. Opt. 25, 562, (1986).
S. L. Bragg and J. D. Kelley, "Atmospheric Water Vapor Absorption at 1.3 .mu.m", Appl. Opt. 26, 506, (1987).

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