Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-08-01
2006-08-01
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500
Reexamination Certificate
active
07084966
ABSTRACT:
The properties of features formed in a substrate are measured. Lenslet array illumination is used to illuminate regions of a substrate so that the features of interest occupy a greater proportion of the illuminated area. The signal-to-noise ratio of the measurement signal is therefore increased, and the sensitivity of the measurement is thus improved.
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Infineon - Technologies AG
Slater & Matsil LLP
Stafira Michael P.
LandOfFree
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