Optics: measuring and testing – By dispersed light spectroscopy – With raman type light scattering
Reexamination Certificate
2004-09-03
2008-08-05
Evans, F. L. (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
With raman type light scattering
Reexamination Certificate
active
07408635
ABSTRACT:
An optical measurement of a crystalline sample to be measured. The sample is irradiated with an exciting light from the polarization direction in which the Raman scattering is prohibited by the selection rule. When a metal probe is brought to proximity to the sample to be measured, the selection rule is eased locally only in the proximity portion near the probe end in order that Raman scattering becomes active. Thus, a Raman signal only from the proximity portion near the probe end is detected. An optical measurement apparatus having an optical arrangement for measuring a signal light re-emitted from a sample to be measured when the sample is irradiated with an exciting light is provided. The optical measurement apparatus comprises a means for limiting the polarization state of the exciting light or signal light and a means for bringing a metal probe near the sample to be measured. The optical measurement apparatus is used to measure the signal light obtained by locally easing the limitation on the polarization state by bringing the metal probe near the sample. Therefore, Raman scattering light from silicon or the like can be measured with high space-resolution exceeding the light diffraction limit.
REFERENCES:
patent: 6144028 (2000-11-01), Kley
patent: 6339217 (2002-01-01), Kley
patent: 6545276 (2003-04-01), Sasaki
patent: 2002/0154301 (2002-10-01), Shen et al.
patent: 58-210546 (1983-12-01), None
patent: 1-16378 (1989-03-01), None
patent: 10-506457 (1998-06-01), None
patent: 2000-298132 (2000-10-01), None
patent: 2001-194286 (2001-07-01), None
patent: 2004-177133 (2004-06-01), None
patent: WO 96/03641 (1996-02-01), None
patent: WO 02/68919 (2002-09-01), None
Kanayama Toshihiko
Pobortchi Vladimir
Tada Tetsuya
Evans F. L.
National Institute of Advanced Industrial Science and Technology
Nur Abdullahi
Patterson & Sheridan LLP
LandOfFree
Optical measurement method and device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical measurement method and device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical measurement method and device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4010802