Optical measurement device with enhanced sensitivity

Details Optical measurement device with enhanced sensitivity Optical measurement device with enhanced sensitivity

1991-03-15

1992-10-27

McGraw, Vincent P.

Optics: measuring and testing

Of light reflection

356448, 356381, 356355, 250571, G01N 2155

Patent

active

051594129

ABSTRACT:
An approach for increasing the sensitivity of a high resolution measurement device 50 is disclosed. The device includes a laser 52 for generating a probe beam 54 which is tightly focused onto the surface of the sample 58. A detector 66 is provided for monitoring a parameter of the reflected probe beam. In accordance with the subject invention, a spatial filter is provided for reducing the amount of light energy reaching the detector that has been reflected from areas on the surface of the sample beyond the focused spot. The spatial filter includes a relay lens 68 and a blocking member 70 located in the focal plane of the lens. The blocking member 70 includes an aperture 72 dimensioned to block light reflected from the surface of the sample beyond a predetermined distance from the center of the focused spot. In this manner, greater sensitivity to sample characteristics within the highly focused spot is achieved.

REFERENCES:
patent: 4831276 (1991-05-01), Hyakumura
patent: 4984894 (1991-01-01), Kondo

Affiliated with

Also associated with

Rating

Optical measurement device with enhanced sensitivity does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical measurement device with enhanced sensitivity, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical measurement device with enhanced sensitivity will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-909086