Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Reexamination Certificate
2008-04-02
2009-11-10
Geisel, Kara E (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
Reexamination Certificate
active
07616307
ABSTRACT:
An optical modulation spectroscopy system comprises a probe beam source and components for directing the probe beam at a sample. It also may comprise a modulated pump beam source and components for directing a modulated pump beam at the sample. A dispersive system may disperse the reflected probe beam into constituent wavelengths to provide dispersed beams. A detector array may detect multiple dispersed reflected probe beams and processes a signal corresponding to each. Thus, measurement may be multiplexed for very fast performance.
REFERENCES:
patent: 7280215 (2007-10-01), Salnik et al.
patent: 7362441 (2008-04-01), Opsal et al.
patent: 2005/0099623 (2005-05-01), Takeuchi et al.
patent: 2005/0213100 (2005-09-01), Murtagh et al.
Kelly Patrick Vincent
Murtagh Martin Edward
Pitter Mark Charles
Sharples Stephen David
Somekh Michael Geoffrey
Geisel Kara E
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
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