Optical measurement apparatus and method

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

Reexamination Certificate

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C356S326000

Reexamination Certificate

active

07616308

ABSTRACT:
An optical measurement apparatus and method a method for performing modulation spectroscopy measurement of a sample comprising: delivering an incident probe beam to a sample at a known spot; modulating reflectance of the probe beam with a pump beam which periodically forms a pump beam spot on the sample coincident with the probe beam spot; and monitoring a reflected probe beam with a detector: wherein the incident probe and pump beams are collinear; and wherein the incident beams are directed to be collinear by reflecting a beam from a facet of an optical waveguide transmitting the other beam.

REFERENCES:
patent: 4750822 (1988-06-01), Rosencwaig et al.
patent: 2004/0104352 (2004-06-01), Opsal et al.
patent: 2004/0174538 (2004-09-01), Opsal et al.
patent: 2006/0098198 (2006-05-01), Chism

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