Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Reexamination Certificate
2008-04-02
2009-11-10
Geisel, Kara E (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
C356S326000
Reexamination Certificate
active
07616308
ABSTRACT:
An optical measurement apparatus and method a method for performing modulation spectroscopy measurement of a sample comprising: delivering an incident probe beam to a sample at a known spot; modulating reflectance of the probe beam with a pump beam which periodically forms a pump beam spot on the sample coincident with the probe beam spot; and monitoring a reflected probe beam with a detector: wherein the incident probe and pump beams are collinear; and wherein the incident beams are directed to be collinear by reflecting a beam from a facet of an optical waveguide transmitting the other beam.
REFERENCES:
patent: 4750822 (1988-06-01), Rosencwaig et al.
patent: 2004/0104352 (2004-06-01), Opsal et al.
patent: 2004/0174538 (2004-09-01), Opsal et al.
patent: 2006/0098198 (2006-05-01), Chism
Kelly Patrick Vincent
Murtagh Martin Edward
Geisel Kara E
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
LandOfFree
Optical measurement apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical measurement apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical measurement apparatus and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4104323