Optical lithographic technique for fabricating submicron-sized J

Details Optical lithographic technique for fabricating submicron-sized J Optical lithographic technique for fabricating submicron-sized J

1981-02-02

1983-11-15

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29571, 357 5, H01L 3922

Patent

active

044147384

ABSTRACT:
Planar superconducting-normal-superconducting (SNS) Josephson microbridges nd superconducting quantum interference devices (SQUIDs) with bridge widths of about 0.2 microns and lengths of about 0.1 micron or less are fabricated with the aid of a technique referred to as "shadow evaporation". The procedure permits the submicron dimensions to be set by edge film thickness and slant evaporation angle, both of which can be accurately measured. Microbridges have been constructed with vanadium banks or electrodes and gold-titanium bridges, although other materials can be used including superconducting metals for the bridge. It is expected that a refined version of this technique would be suitable for repeated batch fabrication of single and multiple Josephson microbridges.

REFERENCES:
patent: 3951708 (1976-04-01), Dean
patent: 3999203 (1976-12-01), Lahiri
patent: 4000014 (1976-12-01), Winter
patent: 4264916 (1981-04-01), Tsang

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