Optical lithographic system having a dynamic coherent optical sy

Details Optical lithographic system having a dynamic coherent optical sy Optical lithographic system having a dynamic coherent optical sy

1982-09-22

1985-02-05

Anderson, Bruce C.

Radiant energy

Luminophor irradiation

B23K 900, H01L 2126

Patent

active

044980094

ABSTRACT:
An optical lithographic system for exposing small linewidths on integrated circuit substrates. The system comprises a deep ultraviolet (UV) source of illumination in conjunction with a dynamic coherent condenser system and an optical projection system and a deep UV sensitive photoresist.

REFERENCES:
patent: 3154371 (1964-10-01), Johnson
patent: 3770340 (1973-11-01), Cronin et al.
patent: 3947093 (1976-03-01), Goshima
patent: 4128752 (1978-12-01), Gravel
patent: 4151008 (1979-04-01), Kirkpatrick
patent: 4315130 (1982-02-01), Inagaki et al.

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