Optical lithographic system

Details Optical lithographic system Optical lithographic system

1985-05-10

1987-03-17

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

350442, 350505, 355 51, 355 66, G03B 2752, G03B 2770

Patent

active

046503153

ABSTRACT:
The present invention is directed to an improvement in optical lithographic systems which includes in combination a ring field projection system and an optical condenser system for illuminating the ring field in the projection system, the condenser system being constructed and arranged to have lateral color of the right sign and magnitude to complement the radial variation in imagery with wavelength of the ring field projection system.

REFERENCES:
patent: 3951546 (1976-04-01), Markle
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4293186 (1981-10-01), Offner
patent: 4294538 (1981-10-01), Ban
patent: 4391494 (1983-07-01), Hershel
patent: 4422754 (1983-12-01), Isohata et al.

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