Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1990-08-28
1991-11-19
Turner, Samuel
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356374, 250237G, G01B 902
Patent
active
050661299
ABSTRACT:
In an averaged diffraction moire position detector of the present invention, diffracted lights which have passed through the same places as those through which measuring diffracted lights have passed are used for monitoring a quantity of light. Therefore, change in the quantity of light of a light source and change in the transmittance of diffraction gratings can be suitably corrected.
REFERENCES:
patent: 4767925 (1988-08-01), Kawamoto
patent: 4836681 (1989-06-01), Van Sauers et al.
patent: 4979827 (1990-12-01), Matsui
Kabushiki Kaisha Okuma Tekkosho
Turner Samuel
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