Optics: measuring and testing – By light interference – Having shearing
Reexamination Certificate
2007-03-20
2007-03-20
Lee, Andrew H. (Department: 2877)
Optics: measuring and testing
By light interference
Having shearing
C356S500000, C356S509000
Reexamination Certificate
active
10227166
ABSTRACT:
An interferometry system includes an interferometer to split an input beam into a measurement beam and at least one other beam. The interferometer directs the measurement beam along a measurement path that includes at least two passes to a measurement object, and overlaps the measurement beam with the other beam after the measurement beam completes the at least two passes. The path of the measurement beam is sheared during the first and second passes when the measurement object moves along a direction orthogonal to a portion of the measurement path that contacts the measurement object. The interferometry system includes optics to redirect the measurement beam after the first pass and before the second pass so that shear imparted during the second pass cancels shear imparted during the first pass. The optics also redirect the measurement beam after the second pass and before overlapping with the other beam so that the measurement beam propagates in a direction that is constant relative to the propagation direction of the other beam independent of changes in the orientation of the optics.
REFERENCES:
patent: 4784490 (1988-11-01), Wayne
patent: 4802765 (1989-02-01), Young et al.
patent: 4881815 (1989-11-01), Sommargren
patent: 4881816 (1989-11-01), Zanoni
patent: 4883357 (1989-11-01), Zanoni et al.
patent: 5064289 (1991-11-01), Bockman
patent: 5200797 (1993-04-01), Tank et al.
patent: 5471304 (1995-11-01), Wang
patent: 5483343 (1996-01-01), Iwamoto et al.
patent: 5675412 (1997-10-01), Solomon
patent: 5715057 (1998-02-01), Bechstein et al.
patent: 5757160 (1998-05-01), Kreuzer
patent: 5757491 (1998-05-01), Cai et al.
patent: 5801832 (1998-09-01), Van Den Brink
patent: 6020964 (2000-02-01), Loopstra et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6252667 (2001-06-01), Hill et al.
patent: 6271923 (2001-08-01), Hill
patent: 6313918 (2001-11-01), Hill
patent: 6552804 (2003-04-01), Hill
patent: 6762845 (2004-07-01), Hill
patent: 2002/0001087 (2002-01-01), Hill
“Documentation Laser Interferometry in Length Measurement Techniques”, Press of the Association of German Engineers, pp. 47-50 (Mar. 12 & 13, 1985), German document with English translation and with Affidavit of Accuracy.
“Documentation Precision of Laser Interferometer Systems”, Press of the Association of German Engineers, pp. 97-98 (Apr. 1989), German document with English translation and with Affidavit of Accuracy.
Fish & Richardson P.C.
Lee Andrew H.
Zygo Corporation
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