Optical interference measuring apparatus and method for measurin

Optics: measuring and testing – By particle light scattering – With photocell detection

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

356351, 356358, 356361, G01B 902

Patent

active

057483159

ABSTRACT:
The present invention relates to an optical interference measuring apparatus and method for measuring displacement of an object. The apparatus and method reduces the displacement-measurement error caused by changes of the refractive index of the atmosphere or the like, in a measurement optical path and a reference optical path, by suppressing crosstalk caused by unfavorable mixing of reference light and measurement light with each other, thereby improving accuracy in the measurement. The apparatus produces interference between a measurement light beam and a reference light beam. The measurement light is propagated through a measurement optical path including a measurement reflector, which is at least movable along the measurement optical path. The reference light is propagated through a reference optical path including a reference reflector. The interference occurs in a predetermined interference system, whereby the displacement of the measurement reflector can be measured. The apparatus, especially, comprises a light path separating system for spatially separating from each other the optical path from the measurement reflector to the interference system, through which the measurement light is propagated, and the optical path from the reference reflector to the interference system, through which the reference light is propagated.

REFERENCES:
patent: 4780617 (1988-10-01), Umstate et al.
patent: 4948254 (1990-08-01), Ishida
patent: 5015866 (1991-05-01), Hayashi
patent: 5394240 (1995-02-01), Matsumoto
patent: 5404222 (1995-04-01), Lis
patent: 5537209 (1996-07-01), Lis
patent: 5543914 (1996-08-01), Henshan et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Optical interference measuring apparatus and method for measurin does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical interference measuring apparatus and method for measurin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical interference measuring apparatus and method for measurin will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-60369

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.