Optical interference apparatus

Details Optical interference apparatus Optical interference apparatus

2007-01-05

2009-08-04

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S456000, C250S339080

Reexamination Certificate

active

07570367

ABSTRACT:
A light emission section includes light generators which are operated on the basis of drive signals from a controller so as to emit near infrared interferable light beams having different specific wavelengths to a light interference section. The light interference section includes a beam splitter having a low-reflection region. The beam splitter allows a most portion of the near infrared interferable light beams to propagate toward an object to be examined, and reflects a portion of the near infrared interferable light beams to a movable mirror. The beam splitter causes interference between measurement light reflected by the object and reference light reflected by the movable mirror, and the resultant interference light propagates to a light detection section. The light detection section receives the interference light and calculates predetermined information regarding the object by making use of the quantity distribution of the interference light. A display section displays the calculated information.

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