Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-05-27
2008-05-27
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C359S619000, C359S621000, C359S623000, C359S624000
Reexamination Certificate
active
07379160
ABSTRACT:
An optical integrator having characteristics to reduce effects of manufacturing errors of many minute refraction surfaces integrally formed by, for example, etching on an illumination intensity distribution. An optical integrator (8) comprising an integrally formed plurality of first minute refraction surfaces (80a) and an integrally formed plurality of second minute refraction surfaces (80b). A parameter β satisfies conditions, |β|<0.2 (where β=(γ−1)3·NA2/Δn2), where a refracting power ratio φa/φb between φa, a refracting power of the first minute refraction surfaces and φb, a refracting power of the second minute refraction surfaces is γ, numerical aperture on an emission side of the optical integrator is NA, and a difference between a refraction index of a medium on a light entrance side of the second minute refraction surfaces and a refraction index of a medium on a light emission side of the second minute refraction surfaces is Δn.
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Mathews Alan
Nikon Corporation
Oliff & Berridg,e PLC
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