Optical integrator and projection exposure apparatus using the s

Details Optical integrator and projection exposure apparatus using the s Optical integrator and projection exposure apparatus using the s

1995-05-05

1997-01-14

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

353 32, 359619, 359620, 362268, F21V 2900, G03B 2754, G02B 2709

Patent

active

055945260

ABSTRACT:
A projection exposure apparatus including a light source system, an optical integrator for forming a plurality of light source images, and a condenser optical system for illuminating a target illumination surface in a rectangular or circular arc pattern in a multiple manner. The optical integrator has, from a light source side, a first lens group which has a plurality of first lens element groups each consisting of a plurality of first lens elements, and a second lens group which has a plurality of second lens element groups each consisting of a plurality of second lens elements. The second lens elements are arranged in a one-to-one correspondence with the first lens elements, and dimensions of the lens section of the first and second lens element satisfy a predetermined relations.

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Jere D. Buckley and Charles Karatzas, "Step and scan: A systems overview of a new lithography tool," SPIE vol. 1088 Optical/Laser Microlithography II (1989), pp. 424-433.

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