Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1993-11-08
1994-10-04
Prenty, Mark V.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257 80, 257 88, 257103, H01L 3112, H01L 2714
Patent
active
053529197
ABSTRACT:
An optical integrated semiconductor device includes a semiconductor substrate, a diffraction grating formed on the semiconductor substrate, an optical waveguide layer deposited on the semiconductor substrate, and at least one of a light-emitting element and a light-detecting element formed on the semiconductor substrate. At least one of the thickness and refractive index of the optical waveguide layer has a value which varies depending on the position in the semiconductor substrate. The optical waveguide layer, the light-emitting element, and the light-detecting element are preferably formed by selective area growth employing vapor-phase epitaxy. The diffraction grating preferably has a constant period. Preferably, the semiconductor substrate is made of InP and the optical waveguide layer is made of In.sub.X Ga.sub.1-X As.sub.y P.sub.1-Y where X and Y have values ranging from 0 to 1.
REFERENCES:
patent: 5262656 (1993-11-01), Blondeau et al.
M. Okai et al., "Optimum design of currugation-pitch-modulated multiple-quantum-well distributed-feedback lasers for narrow spectral linewidth", OFC '91, WM3, Feb. 20, 1991.
O. Kaser, "Selective growth of InP/GaInAs in LP-MOVPE and MOMBE/CBE", Journal of Crystal Growth 107, 1991, pp. 989-998.
T. Kato et al., "Novel MQW DFB Laser Diode/modulator Integrated Light Source Using Bandgap Energy Control Epitaxial Growth Technique", ECOC '91, WeB7-1, pp. 429-432.
H. Ishii et al., "Design and Reflection Char. of Super Structure Grating (SSG)", 1992 Autumn Conference of the Institute of Electronics, Information and Communication Engineers, C-152, pp. 4-174-4-175.
E. Colas et al., "Lateral and longitudinal patterning . . . -masked GaAs substrates: application to thickness-modulated waveguide structures", Journal of Crystal Growth 107, 1991, pp. 226-230.
H. Nishihara, "Integrated-optical techniques using diffraction gratings", The Journal of the Applied Physics, vol. 61, No. 1, 1992, pp. 2-13.
NEC Corporation
Prenty Mark V.
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