Optical inspection using variable apodization

Details Optical inspection using variable apodization Optical inspection using variable apodization

2003-01-14

2009-11-17

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By particle light scattering

With photocell detection

Reexamination Certificate

active

07619735

ABSTRACT:
A method for optical inspection of a surface includes selecting an apodization scheme in response to a characteristic of the surface, and applying an apodizer to apodize a beam of radiation in response to the selected apodization scheme. The apodized beam of radiation is directed to impinge on the surface, whereby a plurality of rays are scattered from the surface, and at least one of the scattered rays is detected, typically in order to detect a defect on the surface.

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