Optical inspection system and method for detecting flaws on a di

Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means

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2503601, 25055918, G01N 2147

Patent

active

056251939

ABSTRACT:
An improved optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: an ultraviolet illumination means for illuminating a region on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.

REFERENCES:
patent: 4655592 (1987-04-01), Allemand
patent: 4794264 (1988-12-01), Quackenbos et al.
patent: 4794265 (1988-12-01), Quackenbos et al.
patent: 4943734 (1990-07-01), Johnson et al.
patent: 5389794 (1995-02-01), Allen et al.
patent: 5493123 (1996-02-01), Knollenberg et al.

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