Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1998-03-30
1999-06-01
Kim, Robert
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356430, 356336, 356337, 356342, G01N 2100
Patent
active
059092769
ABSTRACT:
An optical inspection module detects defects on an active surface of a substrate in an integrated process tool system. The optical inspection module includes an enclosure, a substrate holder, a light source, a light beam path, a lens and a photodetector array. The light source has a light beam port. The light beam path extends from the light beam port to the substrate holder and has a grazing angle of incidence with respect to the active surface of the substrate. The light beam path illuminates substantially the entire active surface. The lens is oriented to collect non-secularly reflected light scattered from the light beam path by any defects on the active surface. The photodetector array has a plurality of pixels which are positioned within a focal plane of the lens. Each pixel corresponds to an area on the active surface, and the plurality of pixels together form a field of view that covers substantially the entire active surface.
REFERENCES:
patent: 3790287 (1974-02-01), Cuthbert et al.
patent: 4342515 (1982-08-01), Akiba et al.
patent: 4377340 (1983-03-01), Green et al.
patent: 4378159 (1983-03-01), Galbraith
patent: 4569695 (1986-02-01), Yamashita et al.
patent: 4655592 (1987-04-01), Allemand
patent: 4692223 (1987-09-01), Lampert et al.
patent: 4772126 (1988-09-01), Allemand et al.
patent: 4895446 (1990-01-01), Maldari et al.
patent: 5189481 (1993-02-01), Jann et al.
patent: 5274434 (1993-12-01), Morioka et al.
patent: 5317380 (1994-05-01), Allemand
patent: 5417537 (1995-05-01), Miller
patent: 5450205 (1995-09-01), Swain et al.
patent: 5479252 (1995-12-01), Worster et al.
patent: 5493123 (1996-02-01), Knollenberg et al.
patent: 5631733 (1997-05-01), Henley
W.P. Shaw and R.P. Sopher, "High Speed Automatic Particle Counter", IBM Technical Disclosure Bulletin, vol. 17, No. 9, Feb. 1975.
D.R. Oswald and D. F. Munro, "A Laser Scan Technique for Electronic Materials Surface Evaluation", Journal of Electronic Materials, vol. 3, No. 1, 1974.
Kinney Patrick D.
Rao Nagaraja P.
Kim Robert
MicroTherm, LLC
Ratliff Reginald A.
LandOfFree
Optical inspection module and method for detecting particles and does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical inspection module and method for detecting particles and, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical inspection module and method for detecting particles and will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-958419