Optical inspection apparatus including a telecentric optical sys

Details Optical inspection apparatus including a telecentric optical sys Optical inspection apparatus including a telecentric optical sys

1996-01-24

1998-02-03

Henry, Jon W.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

359363, 359369, 25055917, 25055944, G01N 2100, G02B 2100

Patent

active

057150508

ABSTRACT:
There is provided an optical inspection apparatus including an illuminating block for emitting light and illuminating a sample with the emitted light, an observing optical system for forming an image from transmitted light or reflected light from the sample, and an observing block for observing the image. The observing optical system comprises an object side lens arranged on an object side close to the sample, an image side lens arranged on an image side remote from the sample, the object side lens and the image side lens being arranged such that the object side lens and the image side lens have focal points coincident to each other, forming a both-side telecentric optical system for acting on the transmitted light or the reflected light to form the image, an aperture arranged on the focal points or in the vicinity thereof, and a screen arranged on a back focal point of the image side lens or in the vicinity thereof for having the image of the sample being projected thereon. The observing block is arranged such that the image of the sample projected on the screen is observed from a rear side of the screen remote from the sample.

REFERENCES:
patent: 4256363 (1981-03-01), Briones
patent: 4469442 (1984-09-01), Reich
patent: 4963724 (1990-10-01), Neumann
patent: 5289260 (1994-02-01), Miyazaki et al.
patent: 5519496 (1996-05-01), Borgert et al.

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