Optical inspection apparatus and optical inspection method

Details Optical inspection apparatus and optical inspection method Optical inspection apparatus and optical inspection method

2005-09-20

2008-09-09

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500

Reexamination Certificate

active

07423745

ABSTRACT:
An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, includes: a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface; and a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.

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patent: 2002-519667 (2002-07-01), None
patent: 2002-287327 (2002-10-01), None

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