Optical inspection

Details Optical inspection Optical inspection

1978-03-13

1980-03-04

Corbin, John K.

Optics: measuring and testing

By particle light scattering

With photocell detection

356360, G01B 902

Patent

active

041914767

ABSTRACT:
In a method of optical inspection of a surface, two patterns of illumination are formed independently on a photosensitive screen respectively by means of light of two different wavelengths. The patterns are formed in the same manner and each results from irradiation of the screen with light derived from a coherent source and consisting of two interfering beams, one of which is constituted by light scattered from the surface under inspection and imaged on to the screen. A video signal is derived from the screen representing the spatial variations in the sum of the intensities in the two patterns.

REFERENCES:
patent: 3816649 (1974-06-01), Butters et al.
patent: 4018531 (1977-04-01), Leendertz
Butters et al., "Speckle Patterns," Physics Bulletin, vol. 23, p. 17, 1972.

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