Optical inspection

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356359, G01B 902

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active

048324949

ABSTRACT:
A method of optical inspection involving laser speckle pattern interferometry comprises comparing two patterns of illumination each resulting from interference and respectively generated by coherent light beams of differing phase or phase wavefront. Apparatus for carrying out such a method comprises at least one coherent light source exhibiting a multimode profile for generating each beam. Application to double pulsed electronic speckle pattern interferometry is particularly appropriate by use of separate sources of variable phase relationship to generate the respective pulses at times which are not constrained as is the case where a common source is used.

REFERENCES:
patent: 4387994 (1983-09-01), Balasubramanian
patent: 4428675 (1984-01-01), Witherow
patent: 4652131 (1987-03-01), Fercher et al.
Thinh et al., "Speckle Method for the Measurement of Helical Motion of a Rigid Body", Optica Acta, vol. 24, No. 12, pp. 1171-1178, Dec. 1977.
Chiang et al., "Laser Speckle Interferometry for Plate Bending Problems", Applied Optics, vol. 15, No. 9, pp. 2199-2204, 9/76.
Lokberg, "Use of Chopped Laser Light in Electronic Speckle Pattern Interferometry", Applied Optics, vol. 18, No. 14, pp. 2377-2384, 7/79.

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