Optical inspecting apparatus having a focusing system with a tel

Details Optical inspecting apparatus having a focusing system with a tel Optical inspecting apparatus having a focusing system with a tel

1996-11-12

1998-04-28

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356237, G01N 2100

Patent

active

057452369

ABSTRACT:
An optical inspecting apparatus illuminates a sample with at least one of a parallel light or a diffused light. Light reflected from the sample or light transmitted through the sample is focused by a telecentric optical system and an aperture stop arranged at a back focal plane in the image space of the telecentric optical system. The sample is viewed based on light thus obtained.

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