Optical: systems and elements – Lens – With light limiting or controlling means
Reexamination Certificate
2005-11-15
2005-11-15
Epps, Georgia (Department: 2873)
Optical: systems and elements
Lens
With light limiting or controlling means
C355S071000
Reexamination Certificate
active
06965484
ABSTRACT:
Optical imaging systems and methods use polarized illumination and a coordinated pupil filter to achieve high contrast. An imaging system includes a light source to generate light for illuminating an object having features aligned in a first direction and features aligned in a second direction, a lens for imaging the illuminated object onto a surface, a spatial selection device, such as a pupil filter, selective in a first mode of light corresponding to features of the illuminated object aligned in the first direction and selective in a second mode of light corresponding to features of the illuminated object aligned in a second direction, a polarization device optically coupled to the spatial selection device and selective in the first mode of s-polarized light corresponding to the first direction and selective in the second mode of s-polarized light corresponding to the second direction, and a controller for selecting operation in the first mode or in the second mode.
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Epps Georgia
Harrington Alicia M
Massachusetts Institute of Technology
Wolf Greenfield & Sacks P.C.
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