Optical imaging systems and methods using polarized...

Optical: systems and elements – Lens – With light limiting or controlling means

Reexamination Certificate

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C355S071000

Reexamination Certificate

active

06965484

ABSTRACT:
Optical imaging systems and methods use polarized illumination and a coordinated pupil filter to achieve high contrast. An imaging system includes a light source to generate light for illuminating an object having features aligned in a first direction and features aligned in a second direction, a lens for imaging the illuminated object onto a surface, a spatial selection device, such as a pupil filter, selective in a first mode of light corresponding to features of the illuminated object aligned in the first direction and selective in a second mode of light corresponding to features of the illuminated object aligned in a second direction, a polarization device optically coupled to the spatial selection device and selective in the first mode of s-polarized light corresponding to the first direction and selective in the second mode of s-polarized light corresponding to the second direction, and a controller for selecting operation in the first mode or in the second mode.

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patent: 5673103 (1997-09-01), Inoue et al.
patent: 5739898 (1998-04-01), Ozawa et al.
patent: 5933219 (1999-08-01), Unno
patent: 07 142338 (1995-06-01), None

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