Optical imaging device having at least one system diaphragm

Details Optical imaging device having at least one system diaphragm Optical imaging device having at least one system diaphragm

2011-08-30

2011-08-30

Allen, Stephone B (Department: 2872)

Optical: systems and elements

Light control by opaque element or medium movable in or...

With rotating or pivoting element

C355S071000

Reexamination Certificate

active

08009343

ABSTRACT:
An optical imaging device (PL), in particular an objective for semiconductor lithography, is provided with at least one system diaphragm. The system diaphragm comprises a multiplicity of mobile plates, which are rotatably mounted. The plates have a spherical curvature.

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Donald L. Klipstein (Jr), The Great Internet Light Bulb Book, Part I; Incandescent including halogen light bulbs. 1996, p. 1-9. found at http://members.misty.com/don/bulb1.html.

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