Optical image measuring apparatus for obtaining a signal...

Details Optical image measuring apparatus for obtaining a signal... Optical image measuring apparatus for obtaining a signal...

2007-07-17

2007-07-17

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S484000

Reexamination Certificate

active

11062592

ABSTRACT:
To provide an optical image measuring apparatus capable of calculating an intensity of a direct current component composed of background light based on a result obtained by detection of interference light and obtaining a signal intensity of the interference light using the calculated intensity. The apparatus includes: an optical interference system to divide a light beam into signal light and reference light, and the signal light propagating through an object to be measured and the reference light are superimposed to produce interference light; beam splitters for dividing it into three interference light beams; shutters to perform sampling; photo detectors for detecting the sampled interference light beams and converting them into electrical signals; and a signal processing portion for calculating the signal intensity of the interference light and the spatial phase distribution thereof based on the electrical signals.

REFERENCES:
patent: 6381015 (2002-04-01), Sonehara et al.
patent: 6496269 (2002-12-01), Mitsutani et al.
patent: 7133137 (2006-11-01), Shimmick
patent: 2001-066247 (2001-03-01), None
patent: 2001-330558 (2001-11-01), None
Japanese Journal of Optics, vol. 28, No. 3, 1999, Naohiro Tanno, Kogaku, pp. 115-125.
Patent Abstracts of Japan; Japanese Publ. No. 2001-330558, Nov. 30, 2001; Japan Science & Technology Corp; 1 page.
European Search Report mailed Aug. 11, 2001, 3 pages.

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