Optical image measuring apparatus and optical image...

Details Optical image measuring apparatus and optical image... Optical image measuring apparatus and optical image...

2007-12-11

2007-12-11

Lyons, Michael A. (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

Reexamination Certificate

active

11194482

ABSTRACT:
An apparatus, which includes a light source, a polarizing plate for converting the light beam to linearly polarized light, a half mirror for dividing the light beam into signal light and reference light and superimposing the signal light and the reference light on each other to produce interference light, a wavelength plate for converting the reference light to circularly polarized light, a frequency shifter for shifting a frequency of the reference light, a reference mirror which is moved by a piezoelectric element, a polarization beam splitter for extracting an S-polarized light component and a P-polarized light component from the interference light, CCDs for detecting the respective polarized light components and outputting detection signals, and portion for calculating a signal intensity of the interference light and a phase thereof based on the detection signals. An image of an object to be measured is formed based on a result obtained by calculation.

REFERENCES:
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patent: 6806963 (2004-10-01), Walti et al.
patent: 6900899 (2005-05-01), Nevis
patent: 7038788 (2006-05-01), Matsumoto
patent: 3245135 (2001-10-01), None
patent: 2001-330558 (2001-11-01), None
New Technology Communications (2003), p. 2; “Optical Heterodyne Technology (revised edition)”.
Kogaku (Japanese Journal of Optics), vol. 28- No. 3, 116(1999).
Electronics letters, vol. 30, 1753, (1994).

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