Optical image measuring apparatus

Details Optical image measuring apparatus Optical image measuring apparatus

2005-03-29

2009-06-16

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07548320

ABSTRACT:
An optical image measuring apparatus including: a beam splitter (4) for dividing a light beam into signal light (S) and reference light (R); beam splitters for dividing the reference light (R) into plural reference light beams frequency shifters for shifting frequencies of the reference light beams by different amounts; and reflector plates arranged at different distances from an object to be measured (O). The reference light beams and the signal light (S) reflected by the object to be measured in depth regions are superimposed on each other to thereby produce interference light. CCD cameras receive the interference light component and convert the interference light component into electrical signals to output the signals. A computer forms images in depth regions corresponding to the interference light components based on the electrical signals.

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