Optical image measuring apparatus

Details Optical image measuring apparatus Optical image measuring apparatus

2007-07-24

2007-07-24

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S489000

Reexamination Certificate

active

11091653

ABSTRACT:
Provided is an optical image measuring apparatus capable of easily changing a scanning interval of an object to be measured in a depth direction with high precision. The apparatus includes an interference optical system for superimposing signal light propagating through the object to be measured on reference light subjected to frequency shift to produce interference light, a reference mirror driving unit for driving a mirror to scan the object to be measured in the depth direction, shutters for sampling interference light beams, CCDs for storing charges for only a predetermined storage time and outputting electrical signals, a control unit for changing the storage time of the CCDs, a signal processing portion for calculating intensities and phases of interference light beams corresponding to each depth of the object to be measured which are successively detected by the CCDs during scanning based on the electrical signals successively outputted from the CCDs every changed storage time, and a setting operation unit for setting the storage time of the CCDs by an operator.

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Yoshizawa, et al. (editors), “Optical Heterodyne Technology;” the article by T. Nakajima, “Principle and application of the optical heterodyne method;”New Technology Communications, revised edition, 2003, pp. 1-11 and cover page (7 sheets total)./Discussed in the specification.

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